minimum detectable quantity

SO₂+SOF₂、H₂S、HF

≤0.1μL/L

CO/H₂ (H₂ is optional)

≤0.5μL/L

purity

≤0.03%

Dew point: resistance capacitance

≤±0.1℃

precision

SO₂+SOF₂、H₂S、HF

 measurement value ≤ 10 μL/L,  error ≤ ± 0.5 μL/L

measured value > 10 μL/L,  error ≤ ± 5%.

CO/H₂

measurement value ≤ 50 μL/L,  error ≤ ± 2.0 μL/L

 measurement value > 50 μL/L,  error≤ ± 4%

purity

≤±0.1 %（W/W）

Dew point: resistance capacitance

≤±1℃

repeatability

SO₂ +SOF₂、H₂S、HF

measured value ≤ 10 μL/L, ≤ 0.2 μL/L

measured value > 10 μL/L, ≤ 2%

CO/H₂

measured value ≤ 50 μL/L, ≤ 1.5 μL/L

measured value > 50 μL/L, ≤ 3%

purity

≤0.05%（W/W）

Dew point: resistance capacitance

<1% (RSD)

range

SO₂ +SOF₂

0～100μL/L,0～2000μL/L

H₂S

0～100μL/L

HF

0～20μL/L

CO/H₂

0～1000μL/L

purity

0～100%

Dew point: resistance capacitance

-80℃～＋20℃

gas flow rate

Decomposition, purity

0.2±5%L/Min  

moisture

0.5±10%L/Min